Innovative Ultrafast Laser Solutions

Innovative Ultrafast Laser Solutions

References

Following is a list of references for additional information on femtosecond micromachining.

F. Korte, S. Adams, A. Egbert, C. Fallnich, A. Ostendorf, S. Nolte, M. Will, J.-P. Ruske, B. N. Chichkov, A. Tünnermann, "Sub-diffraction limited structuring of solid targets with femtosecond laser pulses," Optics Express. 7, 41-49 (2000).

H. K. Tönshoff, C. Momma, A. Ostendorf, S. Nolte, G. Kamlage, "Microdrilling of metals with ultrashort laser pulses," Jour. of Laser Applic. 12, 23-27 (2000).

X. Chen, X. Liu, "Short pulsed laser machining: How short is short enough?" Jour. of Laser Applic. 11, 268-272 (1999).

M. Mendes, V. Oliveira, R. Vilar, F. Beinhorn, J. Ihlemann, O. Conde, "Femtosecond ultraviolet laser micromachining of Al2O3-TiC ceramics," Jour. of Laser Applic. 11, 211-215 (1999).

S. Nolte, G. Kamlage, T. Bauer, F. Korte, C. Fallnich, A. Ostendorf, F. van Alvensleben, Laser Zentrum Hannover e.V., "Microstructuring with femtosecond lasers," WLT, 15, 2.1 (1999).

J. Ihlemann, P. Simon, G. Marowsky, Laser-Laboratorium Göttingen e.V, "Sub-µm-machining of metallic materials with femtosecond excimer lasers," WLT, 15, 4.1 (1999).

S. Nolte, C. Momma, G. Kamlage, A. Ostendorf, C. Fallnich, F. von Alvensleben, H. Welling, "Polarization effects in ultrashort-pulse laser drilling," Applied Physics A, 563 - 567 (1999).

H. K. Tönshoff, A. Ostendorf, Hannover e.V., "Short laser pulses for material processing=Niche or key technology?" WLT, 15, 1.1 (1999).

J.-X. Zhao, B. Hüttner, A. Menchig, "Micromachining with Ultrashort Laser Pulses," SPIE 3618, 1-8 (1999).

S. Nolte, B.N. Chichkov, H. Welling, "Nanostructuring with spatially localized femtosecond laser pulses," Optics Letters, 24, 914-916 (1999).

J. Staud, W. Groß, A. Menschig, "Miniaturized Sensitive Tools for Automation of Micro-Assembly," Institut für Technische Physik, Pfffenwaldring 38-40, Stuttgart, Germany, Reprint from OPTO'98 Proceedings, Erfurt 1998 M. Lenzner, J. Krüger, S. Sartania, Z. Cheng, Sh. Spielmann, G. Mourou, W. Kautek, F. Krausz, "Femtosecond optical breakdown in Dielectrics," Physical Review Letters, 89, 4076 - 4079, (1998).

B.C. Stuart, P.S. Banks, M. D. Perry, M.D. Feit, R.S. Lee, F. Roeske, J.P. Armstrong, H.T. Nguyen, J. A. Sefcik, "Femtosecond Laser Materials Processing," SPIE, 3269, 57-65, (1998).

M.D. Shirk, P.A. Molian, "A review of ultrashort pulsed laser ablation of materials," Jour. of Laser Applic., 10, 18-28, (1998).

R. Bähnisch, W. Groß, J. Staud, A Menschig, "Femtosecond laser based technology for fast development of micromechanical devices," Sensors and Actuators A," E-MRS (1998).

B, Craig, "Ultrafast pulses promise better processing of fine structures," Laser Focus World, Sept, 79-88, (1998).

C. Momma, S. Nolte, G. Kamlage, F. von Alvensleben, A. Tünnermann, "Beam delivery of femtosecond laser radiation by diffractive optical elements," Appl. Phys. A 76, 517-520 (1998).

T.-H. Her, R. J. Finlay, C. Wu, S. Deliwala, E. Mazur, "Microstructuring of silicon with femtosecond laser pulses," Appl. Phys. Let., 73, 1673-1675 (1998).

P.B. Corkum, "Femtosecond lasers and their implications for materials processing," SPIE, 3274, 10-17 (1998).

A.M. Rubenshik, M.D. Feit, M.D. Perry, J.T. Larson, "Numerical simulation of ultra-short laser pulse energy deposition and bulk transport for materials processing," Elsevier, Applied Surface Science, 127-129 (1990) 193-198.

M.D. Feit, A.M. Rubenshik, B.-M. Kim, L.B. da Silva, M.D. Perry, "Physical Characterization of ultrashort laser pulse drilling of biological tissue," Elsevier, Applied Surface Science, 127-129 (1998) 869-874.

S. Ameer-Beg, W. Perrie, S. Rathbone, J. Wright, W. Weaver, H. Champoux, "Femtosecond laser microstructuring of materials," Elsevier, Applied Surface Science, 127-129 (1998) 875-880.

A. Rosenfeld, D. Ashendasi, H. Varel, M. Wähmer, E.E.B. Campbell, "Time resolved detection of particle removal from dielectrics on femtosecond laser ablation," Elsevier, Applied Surface Science 127-129 (1998) 76-80.

H. Varel, M. Wähmer, A. Rosenfeld, D. Ashendasi, E.E.B. Campbell, "Femtosecond laser ablation of sapphire: time-of-flight analysis of ablation plume," Elsevier, Applied Surface Science 127-129 (1998) 128-133.

W. Kautek, S. Pentzien, P. Rudolph, J. Krüger, E. König, "Laser interaction with coated collagen and cellulose fibre composites: fundamentals of laser cleaning of ancient parchment manuscripts and paper," Elsevier, Applied Surface Science 127-129 (1998) 746-754.

A. Cavalleri, K. Sokolowski-Tinten, J. Bialkowski, D. von der Linde, "Femtosecond laser ablation of gallium arsenide investigated with time-of-flight mass spectroscopy," Elsevier, Appl. Phys. Let., 72, 2385-2387, (1998).

P.A. VanRompay, M. Nantel, P.P. Pronko, "Pulse-contrast effects on energy distributions of C1+ to C4+ ions for high-intensity 100-fs laser-ablation plasmas," Elsevier, Applied Surface Science 127-129 (1998) 1023-1028

T. von Woedtke, P. Abel, J. Krüger, W. Kautek, "Subpicosecond pulse laser microstructuring for enhanced reproducibility of biosensors," Elsevier, Sensors and Actuators B 42 (1997) 151-156.

X. Liu, D. Du, A.-C. Tien, G. Mourou, "Laser micromachining with ultrafast lasers," Center for Ultrafast Optical Science, The University of Michigan. X. Liu, D. Du, G. Mourou, "Laser Ablation and micromachining with ultrashort laser pulses," IEEE Jour. of Quantum Electronics, 33, 1706-1716 (1997).

P. Dainesi, J. Ihlemann, P. Simon, "Optimization of a beam delivery system for a short-pulse KrF laser used for material ablation," Appl. Optics, 35, 7080-7085 (1997).

X. Liu, G. Mourou, "Ultrashort laser pulses tackle precision machining," Laser Focus World, August (1997). J. Zhao, R. Bähnisch, W. Groß, H. Hüttner, A. Menschig, "Micromachining with ultrashort laser pulses," Deutsches Sentrus für Luft - und Raumfahrt e.V. - German Aerospace Center, (1999).

A. Luft, U. Franz, A Emsermann, J. Kaspar, "A study of thermal and mechanical effects on materials induced by pulsed laser drilling," Applied Physics A 63, 93 - 101 (1996).

J. Krüger, W. Kautek, "Femtosecond pulse visible laser processing of fibre composite materials," Elsevier, Applied Surface Science 106 (1996) 383-389.

P.P. Pronko, P.A. VanRompay, R.K. Signh, F. Qian, D.Du, X. Liu, "Laser induced avalanche ionization and electron-lattice heating of silicon with intense near IR femtosecond pulses," Mat Res. Soc. Symp. Proc., Vol 397, 45-51, (1996).

P. Simon, J. Ihlemann, "Machining of submicro structures on metals and semiconductors by ultrashort UV-laser pulses," Appl. Phys. A 63, 505-508 (1996).

K Lewotsky, "Femtosecond laser can machine micron holes," Laser Focus World, Jan., 22-24, (1996).

P.P. Pronko, S.K. Dutta, D. Du, R.K. Singh, "Thermophysical effects in laser processing of materials with Picosecond and Femtosecond pulses," J. Appl. Phys. 78 (10) 15 Nov. 6233-6240 (1995).

W. Kautek, J. Krüger, "Femtosecond-Pulse laser Microstructuring of Semiconducting Materials," Materials Science Forum v.173-174, 17-22, (1995).

J. Krüger, W. Kautek, "Femtosecond-pulse laser processing of metallic and semiconducting thin films," SPIE 2403, 236-447, (1995).

S. Preuss, M. Stuke, "Subpicosecond ultraviolet laser ablation of diamond: Nonlinear properties at 248nm and time-resolved characterization of ablation dynamics," Appl. Phys. Lett., 76, 338-340, (1995).

P.P. Pronko, S.K. Dutta, J. Squier, J.V. Rudd, D. Du, G. Mourou, "Machining of sub-micron holes using a femtosecond laser at 800 nm," Elsevier, Optics Communications 114, 106-110, (1995).

W. Kautek, J. Krüger, "Femtosecond pulse laser ablation of metallic, semiconducting, ceramic, and biological materials," SPIE, 2207, 600-611, (1994).

S. Preuß, M. Späth, M. Stuke, "Time Resolved Laser Ablation of Polymers and Inorganic Crystals," Elsevier, Microelectronic Engineering 25, 313-320 (1994).

A. Smirl, I. Boyd, T. Boggess, S. Moss, H. van Driel, "Structural changes produced in silicon by intense 1-µm ps pulses," J. Appl Phys. 60 1169-1182 (1986).

B.K.A. Ngoi, K. Venkatakrishnan, L.E.N. Lim, B. Tan, "Submicron micromachining on silicon wafer using femtosecond pulse laser," Jour. of Laser Applications 13, 41-43 (2001).

H. K. Tönshoff, Ostendorf, K. Körber, T. Wagner, "Micromachining of Semiconductors with Femtosecond Lasers," Published on Proceedings of ICALEO 2000, Dearborn (USA). A. Macrinkevicius, S. Juodkazis, "Femtosecond laser-assisted three-dimensional microfabrication in silica," Opt. Lett. 26, 227-279 (2001).

Y. Kondo, J Qiu, T Mitsuyu, K. Hirao, T. Yoko, "Three-Dimensional microdrilling of glass by multiphoton process and chemical etching."